12/7/2010	10:41:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	10:41:32 AM	Recipe started at 10:41 AM
12/7/2010	10:41:32 AM	H2 valve closed
12/7/2010	10:41:32 AM	BCl3 valve closed
12/7/2010	10:41:32 AM	PH3 valve closed
12/7/2010	10:41:32 AM	SiCl4 pre valve closed
12/7/2010	10:41:32 AM	SiCl4 post valve closed
12/7/2010	10:41:32 AM	Main Vac valve closed
12/7/2010	10:41:32 AM	Bypass valve closed
12/7/2010	10:41:32 AM	Bubbler valve closed
12/7/2010	10:41:32 AM	Helium valve opened
12/7/2010	10:41:32 AM	Helium MFC set to  500.000000
12/7/2010	10:41:32 AM	H2 MFC set to  0.000000
12/7/2010	10:41:32 AM	BCl3 MFC set to  0.000000
12/7/2010	10:41:32 AM	PHl3 MFC set to  0.000000
12/7/2010	10:41:32 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:41:32 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:41:32 AM	Tube furnace set to 0
12/7/2010	10:42:53 AM	Helium valve closed
12/7/2010	10:42:53 AM	H2 valve closed
12/7/2010	10:42:53 AM	BCl3 valve closed
12/7/2010	10:42:53 AM	PH3 valve closed
12/7/2010	10:42:53 AM	SiCl4 pre valve closed
12/7/2010	10:42:53 AM	SiCl4 post valve closed
12/7/2010	10:42:53 AM	Main Vac valve closed
12/7/2010	10:42:53 AM	Bypass valve closed
12/7/2010	10:42:53 AM	Bubbler valve closed
12/7/2010	10:42:53 AM	Helium MFC set to  0.000000
12/7/2010	10:42:53 AM	H2 MFC set to  0.000000
12/7/2010	10:42:53 AM	BCl3 MFC set to  0.000000
12/7/2010	10:42:53 AM	PHl3 MFC set to  0.000000
12/7/2010	10:42:53 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:42:53 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:42:53 AM	Tube furnace set to 0
12/7/2010	10:42:53 AM	Run finished at 10:42 AM
12/7/2010	10:42:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	10:52:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2010	10:52:10 AM	Recipe started at 10:52 AM
12/7/2010	10:52:10 AM	Helium valve closed
12/7/2010	10:52:10 AM	H2 valve closed
12/7/2010	10:52:10 AM	BCl3 valve closed
12/7/2010	10:52:10 AM	PH3 valve closed
12/7/2010	10:52:10 AM	SiCl4 pre valve closed
12/7/2010	10:52:10 AM	SiCl4 post valve closed
12/7/2010	10:52:10 AM	Main Vac valve closed
12/7/2010	10:52:10 AM	Bubbler valve closed
12/7/2010	10:52:10 AM	Bypass valve opened
12/7/2010	10:52:10 AM	Helium MFC set to  0.000000
12/7/2010	10:52:10 AM	H2 MFC set to  0.000000
12/7/2010	10:52:10 AM	BCl3 MFC set to  0.000000
12/7/2010	10:52:10 AM	PHl3 MFC set to  0.000000
12/7/2010	10:52:10 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:52:10 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:52:10 AM	Tube furnace set to 0
12/7/2010	10:53:03 AM	Helium valve closed
12/7/2010	10:53:03 AM	H2 valve closed
12/7/2010	10:53:03 AM	BCl3 valve closed
12/7/2010	10:53:03 AM	PH3 valve closed
12/7/2010	10:53:03 AM	SiCl4 pre valve closed
12/7/2010	10:53:03 AM	SiCl4 post valve closed
12/7/2010	10:53:03 AM	Bubbler valve closed
12/7/2010	10:53:03 AM	Main Vac valve opened
12/7/2010	10:53:03 AM	Bypass valve opened
12/7/2010	10:53:03 AM	Helium MFC set to  0.000000
12/7/2010	10:53:03 AM	H2 MFC set to  0.000000
12/7/2010	10:53:03 AM	BCl3 MFC set to  0.000000
12/7/2010	10:53:03 AM	PHl3 MFC set to  0.000000
12/7/2010	10:53:03 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:53:03 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:53:03 AM	Tube furnace set to 0
12/7/2010	10:53:04 AM	Run finished at 10:53 AM
12/7/2010	10:53:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2010	10:56:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	10:56:24 AM	Recipe started at 10:56 AM
12/7/2010	10:56:24 AM	Helium valve closed
12/7/2010	10:56:24 AM	H2 valve closed
12/7/2010	10:56:24 AM	BCl3 valve closed
12/7/2010	10:56:24 AM	PH3 valve closed
12/7/2010	10:56:24 AM	SiCl4 pre valve closed
12/7/2010	10:56:24 AM	SiCl4 post valve closed
12/7/2010	10:56:24 AM	Main Vac valve closed
12/7/2010	10:56:24 AM	Bubbler valve closed
12/7/2010	10:56:24 AM	Bypass valve opened
12/7/2010	10:56:24 AM	Helium MFC set to  0.000000
12/7/2010	10:56:24 AM	H2 MFC set to  0.000000
12/7/2010	10:56:24 AM	BCl3 MFC set to  0.000000
12/7/2010	10:56:24 AM	PHl3 MFC set to  0.000000
12/7/2010	10:56:24 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:56:24 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:56:25 AM	Tube furnace set to 0
12/7/2010	10:56:25 AM	Helium valve closed
12/7/2010	10:56:25 AM	H2 valve closed
12/7/2010	10:56:25 AM	BCl3 valve closed
12/7/2010	10:56:25 AM	PH3 valve closed
12/7/2010	10:56:25 AM	SiCl4 pre valve closed
12/7/2010	10:56:25 AM	SiCl4 post valve closed
12/7/2010	10:56:25 AM	Bubbler valve closed
12/7/2010	10:56:25 AM	Main Vac valve opened
12/7/2010	10:56:25 AM	Bypass valve opened
12/7/2010	10:56:25 AM	Helium MFC set to  0.000000
12/7/2010	10:56:25 AM	H2 MFC set to  0.000000
12/7/2010	10:56:25 AM	BCl3 MFC set to  0.000000
12/7/2010	10:56:25 AM	PHl3 MFC set to  0.000000
12/7/2010	10:56:25 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:56:25 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:56:25 AM	Tube furnace set to 0
12/7/2010	10:57:25 AM	H2 valve closed
12/7/2010	10:57:25 AM	BCl3 valve closed
12/7/2010	10:57:25 AM	PH3 valve closed
12/7/2010	10:57:25 AM	SiCl4 pre valve closed
12/7/2010	10:57:25 AM	SiCl4 post valve closed
12/7/2010	10:57:25 AM	Bubbler valve closed
12/7/2010	10:57:25 AM	Helium valve opened
12/7/2010	10:57:25 AM	Main Vac valve opened
12/7/2010	10:57:25 AM	Bypass valve opened
12/7/2010	10:57:25 AM	Helium MFC set to  100.000000
12/7/2010	10:57:25 AM	H2 MFC set to  0.000000
12/7/2010	10:57:25 AM	BCl3 MFC set to  0.000000
12/7/2010	10:57:25 AM	PHl3 MFC set to  0.000000
12/7/2010	10:57:25 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:57:25 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:57:25 AM	Tube furnace set to 0
12/7/2010	10:58:25 AM	Helium valve closed
12/7/2010	10:58:25 AM	H2 valve closed
12/7/2010	10:58:25 AM	BCl3 valve closed
12/7/2010	10:58:25 AM	PH3 valve closed
12/7/2010	10:58:25 AM	SiCl4 pre valve closed
12/7/2010	10:58:25 AM	SiCl4 post valve closed
12/7/2010	10:58:25 AM	Bubbler valve closed
12/7/2010	10:58:25 AM	Main Vac valve opened
12/7/2010	10:58:25 AM	Bypass valve opened
12/7/2010	10:58:25 AM	Helium MFC set to  0.000000
12/7/2010	10:58:25 AM	H2 MFC set to  0.000000
12/7/2010	10:58:25 AM	BCl3 MFC set to  0.000000
12/7/2010	10:58:25 AM	PHl3 MFC set to  0.000000
12/7/2010	10:58:25 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:58:25 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:58:25 AM	Tube furnace set to 0
12/7/2010	10:59:25 AM	H2 valve closed
12/7/2010	10:59:25 AM	BCl3 valve closed
12/7/2010	10:59:25 AM	PH3 valve closed
12/7/2010	10:59:26 AM	SiCl4 pre valve closed
12/7/2010	10:59:26 AM	SiCl4 post valve closed
12/7/2010	10:59:26 AM	Bubbler valve closed
12/7/2010	10:59:26 AM	Helium valve opened
12/7/2010	10:59:26 AM	Main Vac valve opened
12/7/2010	10:59:26 AM	Bypass valve opened
12/7/2010	10:59:26 AM	Helium MFC set to  100.000000
12/7/2010	10:59:26 AM	H2 MFC set to  0.000000
12/7/2010	10:59:26 AM	BCl3 MFC set to  0.000000
12/7/2010	10:59:26 AM	PHl3 MFC set to  0.000000
12/7/2010	10:59:26 AM	SiCl4 MFC set to  0.000000
12/7/2010	10:59:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	10:59:26 AM	Tube furnace set to 0
12/7/2010	11:00:26 AM	Helium valve closed
12/7/2010	11:00:26 AM	H2 valve closed
12/7/2010	11:00:26 AM	BCl3 valve closed
12/7/2010	11:00:26 AM	PH3 valve closed
12/7/2010	11:00:26 AM	SiCl4 pre valve closed
12/7/2010	11:00:26 AM	SiCl4 post valve closed
12/7/2010	11:00:26 AM	Bubbler valve closed
12/7/2010	11:00:26 AM	Main Vac valve opened
12/7/2010	11:00:26 AM	Bypass valve opened
12/7/2010	11:00:26 AM	Helium MFC set to  0.000000
12/7/2010	11:00:26 AM	H2 MFC set to  0.000000
12/7/2010	11:00:26 AM	BCl3 MFC set to  0.000000
12/7/2010	11:00:26 AM	PHl3 MFC set to  0.000000
12/7/2010	11:00:26 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:00:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:00:26 AM	Tube furnace set to 0
12/7/2010	11:01:26 AM	H2 valve closed
12/7/2010	11:01:26 AM	BCl3 valve closed
12/7/2010	11:01:26 AM	PH3 valve closed
12/7/2010	11:01:26 AM	SiCl4 pre valve closed
12/7/2010	11:01:26 AM	SiCl4 post valve closed
12/7/2010	11:01:26 AM	Bubbler valve closed
12/7/2010	11:01:26 AM	Helium valve opened
12/7/2010	11:01:26 AM	Main Vac valve opened
12/7/2010	11:01:26 AM	Bypass valve opened
12/7/2010	11:01:26 AM	Helium MFC set to  100.000000
12/7/2010	11:01:26 AM	H2 MFC set to  0.000000
12/7/2010	11:01:26 AM	BCl3 MFC set to  0.000000
12/7/2010	11:01:26 AM	PHl3 MFC set to  0.000000
12/7/2010	11:01:26 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:01:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:01:26 AM	Tube furnace set to 0
12/7/2010	11:02:26 AM	Helium valve closed
12/7/2010	11:02:26 AM	H2 valve closed
12/7/2010	11:02:26 AM	BCl3 valve closed
12/7/2010	11:02:26 AM	PH3 valve closed
12/7/2010	11:02:26 AM	SiCl4 pre valve closed
12/7/2010	11:02:26 AM	SiCl4 post valve closed
12/7/2010	11:02:26 AM	Bubbler valve closed
12/7/2010	11:02:26 AM	Main Vac valve opened
12/7/2010	11:02:26 AM	Bypass valve opened
12/7/2010	11:02:26 AM	Helium MFC set to  0.000000
12/7/2010	11:02:26 AM	H2 MFC set to  0.000000
12/7/2010	11:02:26 AM	BCl3 MFC set to  0.000000
12/7/2010	11:02:26 AM	PHl3 MFC set to  0.000000
12/7/2010	11:02:26 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:02:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:02:26 AM	Tube furnace set to 0
12/7/2010	11:03:26 AM	H2 valve closed
12/7/2010	11:03:26 AM	BCl3 valve closed
12/7/2010	11:03:26 AM	PH3 valve closed
12/7/2010	11:03:26 AM	SiCl4 pre valve closed
12/7/2010	11:03:26 AM	SiCl4 post valve closed
12/7/2010	11:03:26 AM	Bubbler valve closed
12/7/2010	11:03:26 AM	Helium valve opened
12/7/2010	11:03:26 AM	Main Vac valve opened
12/7/2010	11:03:26 AM	Bypass valve opened
12/7/2010	11:03:26 AM	Helium MFC set to  100.000000
12/7/2010	11:03:26 AM	H2 MFC set to  0.000000
12/7/2010	11:03:26 AM	BCl3 MFC set to  0.000000
12/7/2010	11:03:26 AM	PHl3 MFC set to  0.000000
12/7/2010	11:03:26 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:03:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:03:26 AM	Tube furnace set to 0
12/7/2010	11:04:26 AM	Helium valve closed
12/7/2010	11:04:26 AM	H2 valve closed
12/7/2010	11:04:26 AM	BCl3 valve closed
12/7/2010	11:04:26 AM	PH3 valve closed
12/7/2010	11:04:26 AM	SiCl4 pre valve closed
12/7/2010	11:04:26 AM	SiCl4 post valve closed
12/7/2010	11:04:26 AM	Bubbler valve closed
12/7/2010	11:04:26 AM	Main Vac valve opened
12/7/2010	11:04:27 AM	Bypass valve opened
12/7/2010	11:04:27 AM	Helium MFC set to  0.000000
12/7/2010	11:04:27 AM	H2 MFC set to  0.000000
12/7/2010	11:04:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:04:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:04:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:04:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:04:27 AM	Tube furnace set to 0
12/7/2010	11:05:27 AM	H2 valve closed
12/7/2010	11:05:27 AM	BCl3 valve closed
12/7/2010	11:05:27 AM	PH3 valve closed
12/7/2010	11:05:27 AM	SiCl4 pre valve closed
12/7/2010	11:05:27 AM	SiCl4 post valve closed
12/7/2010	11:05:27 AM	Bubbler valve closed
12/7/2010	11:05:27 AM	Helium valve opened
12/7/2010	11:05:27 AM	Main Vac valve opened
12/7/2010	11:05:27 AM	Bypass valve opened
12/7/2010	11:05:27 AM	Helium MFC set to  100.000000
12/7/2010	11:05:27 AM	H2 MFC set to  0.000000
12/7/2010	11:05:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:05:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:05:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:05:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:05:27 AM	Tube furnace set to 0
12/7/2010	11:06:27 AM	Helium valve closed
12/7/2010	11:06:27 AM	H2 valve closed
12/7/2010	11:06:27 AM	BCl3 valve closed
12/7/2010	11:06:27 AM	PH3 valve closed
12/7/2010	11:06:27 AM	SiCl4 pre valve closed
12/7/2010	11:06:27 AM	SiCl4 post valve closed
12/7/2010	11:06:27 AM	Bubbler valve closed
12/7/2010	11:06:27 AM	Main Vac valve opened
12/7/2010	11:06:27 AM	Bypass valve opened
12/7/2010	11:06:27 AM	Helium MFC set to  0.000000
12/7/2010	11:06:27 AM	H2 MFC set to  0.000000
12/7/2010	11:06:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:06:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:06:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:06:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:06:27 AM	Tube furnace set to 0
12/7/2010	11:07:27 AM	H2 valve closed
12/7/2010	11:07:27 AM	BCl3 valve closed
12/7/2010	11:07:27 AM	PH3 valve closed
12/7/2010	11:07:27 AM	SiCl4 pre valve closed
12/7/2010	11:07:27 AM	SiCl4 post valve closed
12/7/2010	11:07:27 AM	Bubbler valve closed
12/7/2010	11:07:27 AM	Helium valve opened
12/7/2010	11:07:27 AM	Main Vac valve opened
12/7/2010	11:07:27 AM	Bypass valve opened
12/7/2010	11:07:27 AM	Helium MFC set to  100.000000
12/7/2010	11:07:27 AM	H2 MFC set to  0.000000
12/7/2010	11:07:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:07:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:07:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:07:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:07:27 AM	Tube furnace set to 0
12/7/2010	11:08:27 AM	Helium valve closed
12/7/2010	11:08:27 AM	H2 valve closed
12/7/2010	11:08:27 AM	BCl3 valve closed
12/7/2010	11:08:27 AM	PH3 valve closed
12/7/2010	11:08:27 AM	SiCl4 pre valve closed
12/7/2010	11:08:27 AM	SiCl4 post valve closed
12/7/2010	11:08:27 AM	Bubbler valve closed
12/7/2010	11:08:27 AM	Main Vac valve opened
12/7/2010	11:08:27 AM	Bypass valve opened
12/7/2010	11:08:27 AM	Helium MFC set to  0.000000
12/7/2010	11:08:27 AM	H2 MFC set to  0.000000
12/7/2010	11:08:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:08:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:08:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:08:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:08:27 AM	Tube furnace set to 0
12/7/2010	11:09:27 AM	H2 valve closed
12/7/2010	11:09:27 AM	BCl3 valve closed
12/7/2010	11:09:27 AM	PH3 valve closed
12/7/2010	11:09:27 AM	SiCl4 pre valve closed
12/7/2010	11:09:27 AM	SiCl4 post valve closed
12/7/2010	11:09:27 AM	Bubbler valve closed
12/7/2010	11:09:27 AM	Helium valve opened
12/7/2010	11:09:27 AM	Main Vac valve opened
12/7/2010	11:09:27 AM	Bypass valve opened
12/7/2010	11:09:27 AM	Helium MFC set to  100.000000
12/7/2010	11:09:27 AM	H2 MFC set to  0.000000
12/7/2010	11:09:27 AM	BCl3 MFC set to  0.000000
12/7/2010	11:09:27 AM	PHl3 MFC set to  0.000000
12/7/2010	11:09:27 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:09:27 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:09:28 AM	Tube furnace set to 0
12/7/2010	11:10:28 AM	Helium valve closed
12/7/2010	11:10:28 AM	H2 valve closed
12/7/2010	11:10:28 AM	BCl3 valve closed
12/7/2010	11:10:28 AM	PH3 valve closed
12/7/2010	11:10:28 AM	SiCl4 pre valve closed
12/7/2010	11:10:28 AM	SiCl4 post valve closed
12/7/2010	11:10:28 AM	Bubbler valve closed
12/7/2010	11:10:28 AM	Main Vac valve opened
12/7/2010	11:10:28 AM	Bypass valve opened
12/7/2010	11:10:28 AM	Helium MFC set to  0.000000
12/7/2010	11:10:28 AM	H2 MFC set to  0.000000
12/7/2010	11:10:28 AM	BCl3 MFC set to  0.000000
12/7/2010	11:10:28 AM	PHl3 MFC set to  0.000000
12/7/2010	11:10:28 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:10:28 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:10:28 AM	Tube furnace set to 0
12/7/2010	11:11:28 AM	H2 valve closed
12/7/2010	11:11:28 AM	BCl3 valve closed
12/7/2010	11:11:28 AM	PH3 valve closed
12/7/2010	11:11:28 AM	SiCl4 pre valve closed
12/7/2010	11:11:28 AM	SiCl4 post valve closed
12/7/2010	11:11:28 AM	Bubbler valve closed
12/7/2010	11:11:28 AM	Helium valve opened
12/7/2010	11:11:28 AM	Main Vac valve opened
12/7/2010	11:11:28 AM	Bypass valve opened
12/7/2010	11:11:28 AM	Helium MFC set to  100.000000
12/7/2010	11:11:28 AM	H2 MFC set to  0.000000
12/7/2010	11:11:28 AM	BCl3 MFC set to  0.000000
12/7/2010	11:11:28 AM	PHl3 MFC set to  0.000000
12/7/2010	11:11:28 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:11:28 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:11:28 AM	Tube furnace set to 0
12/7/2010	11:12:28 AM	Helium valve closed
12/7/2010	11:12:28 AM	H2 valve closed
12/7/2010	11:12:28 AM	BCl3 valve closed
12/7/2010	11:12:28 AM	PH3 valve closed
12/7/2010	11:12:28 AM	SiCl4 pre valve closed
12/7/2010	11:12:28 AM	SiCl4 post valve closed
12/7/2010	11:12:28 AM	Bubbler valve closed
12/7/2010	11:12:28 AM	Main Vac valve opened
12/7/2010	11:12:28 AM	Bypass valve opened
12/7/2010	11:12:28 AM	Helium MFC set to  0.000000
12/7/2010	11:12:28 AM	H2 MFC set to  0.000000
12/7/2010	11:12:28 AM	BCl3 MFC set to  0.000000
12/7/2010	11:12:28 AM	PHl3 MFC set to  0.000000
12/7/2010	11:12:28 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:12:28 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:12:28 AM	Tube furnace set to 0
12/7/2010	11:13:28 AM	H2 valve closed
12/7/2010	11:13:28 AM	BCl3 valve closed
12/7/2010	11:13:28 AM	PH3 valve closed
12/7/2010	11:13:28 AM	SiCl4 pre valve closed
12/7/2010	11:13:28 AM	SiCl4 post valve closed
12/7/2010	11:13:28 AM	Bubbler valve closed
12/7/2010	11:13:28 AM	Helium valve opened
12/7/2010	11:13:28 AM	Main Vac valve opened
12/7/2010	11:13:28 AM	Bypass valve opened
12/7/2010	11:13:28 AM	Helium MFC set to  100.000000
12/7/2010	11:13:28 AM	H2 MFC set to  0.000000
12/7/2010	11:13:28 AM	BCl3 MFC set to  0.000000
12/7/2010	11:13:28 AM	PHl3 MFC set to  0.000000
12/7/2010	11:13:28 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:13:28 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:13:28 AM	Tube furnace set to 0
12/7/2010	11:14:28 AM	Helium valve closed
12/7/2010	11:14:28 AM	H2 valve closed
12/7/2010	11:14:28 AM	BCl3 valve closed
12/7/2010	11:14:28 AM	PH3 valve closed
12/7/2010	11:14:28 AM	SiCl4 pre valve closed
12/7/2010	11:14:28 AM	SiCl4 post valve closed
12/7/2010	11:14:28 AM	Bubbler valve closed
12/7/2010	11:14:28 AM	Main Vac valve opened
12/7/2010	11:14:28 AM	Bypass valve opened
12/7/2010	11:14:28 AM	Helium MFC set to  0.000000
12/7/2010	11:14:28 AM	H2 MFC set to  0.000000
12/7/2010	11:14:28 AM	BCl3 MFC set to  0.000000
12/7/2010	11:14:28 AM	PHl3 MFC set to  0.000000
12/7/2010	11:14:28 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:14:28 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:14:29 AM	Tube furnace set to 0
12/7/2010	11:15:29 AM	H2 valve closed
12/7/2010	11:15:29 AM	BCl3 valve closed
12/7/2010	11:15:29 AM	PH3 valve closed
12/7/2010	11:15:29 AM	SiCl4 pre valve closed
12/7/2010	11:15:29 AM	SiCl4 post valve closed
12/7/2010	11:15:29 AM	Bubbler valve closed
12/7/2010	11:15:29 AM	Helium valve opened
12/7/2010	11:15:29 AM	Main Vac valve opened
12/7/2010	11:15:29 AM	Bypass valve opened
12/7/2010	11:15:29 AM	Helium MFC set to  100.000000
12/7/2010	11:15:29 AM	H2 MFC set to  0.000000
12/7/2010	11:15:29 AM	BCl3 MFC set to  0.000000
12/7/2010	11:15:29 AM	PHl3 MFC set to  0.000000
12/7/2010	11:15:29 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:15:29 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:15:29 AM	Tube furnace set to 0
12/7/2010	11:16:29 AM	Helium valve closed
12/7/2010	11:16:29 AM	H2 valve closed
12/7/2010	11:16:29 AM	BCl3 valve closed
12/7/2010	11:16:29 AM	PH3 valve closed
12/7/2010	11:16:29 AM	SiCl4 pre valve closed
12/7/2010	11:16:29 AM	SiCl4 post valve closed
12/7/2010	11:16:29 AM	Bubbler valve closed
12/7/2010	11:16:29 AM	Main Vac valve opened
12/7/2010	11:16:29 AM	Bypass valve opened
12/7/2010	11:16:29 AM	Helium MFC set to  0.000000
12/7/2010	11:16:29 AM	H2 MFC set to  0.000000
12/7/2010	11:16:29 AM	BCl3 MFC set to  0.000000
12/7/2010	11:16:29 AM	PHl3 MFC set to  0.000000
12/7/2010	11:16:29 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:16:29 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:16:29 AM	Tube furnace set to 0
12/7/2010	11:16:30 AM	Run finished at 11:16 AM
12/7/2010	11:16:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	11:52:50 AM	Recipe started at 11:52 AM
12/7/2010	11:52:50 AM	Helium valve closed
12/7/2010	11:52:50 AM	BCl3 valve closed
12/7/2010	11:52:50 AM	PH3 valve closed
12/7/2010	11:52:50 AM	SiCl4 pre valve closed
12/7/2010	11:52:50 AM	SiCl4 post valve closed
12/7/2010	11:52:50 AM	Main Vac valve closed
12/7/2010	11:52:50 AM	Bypass valve closed
12/7/2010	11:52:50 AM	Bubbler valve closed
12/7/2010	11:52:50 AM	H2 valve opened
12/7/2010	11:52:50 AM	Helium MFC set to  0.000000
12/7/2010	11:52:50 AM	H2 MFC set to  500.000000
12/7/2010	11:52:50 AM	BCl3 MFC set to  0.000000
12/7/2010	11:52:50 AM	PHl3 MFC set to  0.000000
12/7/2010	11:52:50 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:52:50 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:52:50 AM	Tube furnace set to 100
12/7/2010	11:54:13 AM	Helium valve closed
12/7/2010	11:54:13 AM	BCl3 valve closed
12/7/2010	11:54:13 AM	PH3 valve closed
12/7/2010	11:54:13 AM	SiCl4 pre valve closed
12/7/2010	11:54:13 AM	SiCl4 post valve closed
12/7/2010	11:54:13 AM	Main Vac valve closed
12/7/2010	11:54:13 AM	Bypass valve closed
12/7/2010	11:54:13 AM	H2 valve opened
12/7/2010	11:54:13 AM	Bubbler valve opened
12/7/2010	11:54:13 AM	Helium MFC set to  0.000000
12/7/2010	11:54:13 AM	H2 MFC set to  500.000000
12/7/2010	11:54:13 AM	BCl3 MFC set to  0.000000
12/7/2010	11:54:13 AM	PHl3 MFC set to  0.000000
12/7/2010	11:54:13 AM	SiCl4 MFC set to  0.000000
12/7/2010	11:54:13 AM	Bypass solenoid MFC set to  0.000000
12/7/2010	11:54:13 AM	Tube furnace set to 1000
12/7/2010	12:14:13 PM	Helium valve closed
12/7/2010	12:14:13 PM	PH3 valve closed
12/7/2010	12:14:13 PM	Main Vac valve closed
12/7/2010	12:14:13 PM	Bypass valve closed
12/7/2010	12:14:13 PM	H2 valve opened
12/7/2010	12:14:13 PM	BCl3 valve opened
12/7/2010	12:14:13 PM	SiCl4 pre valve opened
12/7/2010	12:14:13 PM	SiCl4 post valve opened
12/7/2010	12:14:13 PM	Bubbler valve opened
12/7/2010	12:14:13 PM	Helium MFC set to  0.000000
12/7/2010	12:14:13 PM	H2 MFC set to  500.000000
12/7/2010	12:14:13 PM	BCl3 MFC set to  10.000000
12/7/2010	12:14:13 PM	PHl3 MFC set to  0.000000
12/7/2010	12:14:13 PM	SiCl4 MFC set to  50.000000
12/7/2010	12:14:13 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	12:14:13 PM	Tube furnace set to 1000
12/7/2010	12:26:13 PM	H2 valve closed
12/7/2010	12:26:13 PM	BCl3 valve closed
12/7/2010	12:26:13 PM	PH3 valve closed
12/7/2010	12:26:13 PM	SiCl4 pre valve closed
12/7/2010	12:26:13 PM	SiCl4 post valve closed
12/7/2010	12:26:13 PM	Main Vac valve closed
12/7/2010	12:26:13 PM	Bypass valve closed
12/7/2010	12:26:13 PM	Helium valve opened
12/7/2010	12:26:13 PM	Bubbler valve opened
12/7/2010	12:26:13 PM	Helium MFC set to  500.000000
12/7/2010	12:26:13 PM	H2 MFC set to  0.000000
12/7/2010	12:26:13 PM	BCl3 MFC set to  0.000000
12/7/2010	12:26:13 PM	PHl3 MFC set to  0.000000
12/7/2010	12:26:13 PM	SiCl4 MFC set to  0.000000
12/7/2010	12:26:13 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	12:26:13 PM	Tube furnace set to 0
12/7/2010	12:46:13 PM	Helium valve closed
12/7/2010	12:46:13 PM	H2 valve closed
12/7/2010	12:46:13 PM	BCl3 valve closed
12/7/2010	12:46:13 PM	PH3 valve closed
12/7/2010	12:46:13 PM	SiCl4 pre valve closed
12/7/2010	12:46:13 PM	SiCl4 post valve closed
12/7/2010	12:46:13 PM	Main Vac valve closed
12/7/2010	12:46:13 PM	Bypass valve closed
12/7/2010	12:46:13 PM	Bubbler valve closed
12/7/2010	12:46:13 PM	Helium MFC set to  500.000000
12/7/2010	12:46:13 PM	H2 MFC set to  0.000000
12/7/2010	12:46:13 PM	BCl3 MFC set to  0.000000
12/7/2010	12:46:13 PM	PHl3 MFC set to  0.000000
12/7/2010	12:46:13 PM	SiCl4 MFC set to  0.000000
12/7/2010	12:46:13 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	12:46:13 PM	Tube furnace set to 0
12/7/2010	12:46:14 PM	Run finished at 12:46 PM
12/7/2010	1:16:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	1:16:21 PM	Recipe started at 1:16 PM
12/7/2010	1:16:21 PM	H2 valve closed
12/7/2010	1:16:21 PM	BCl3 valve closed
12/7/2010	1:16:21 PM	PH3 valve closed
12/7/2010	1:16:21 PM	SiCl4 pre valve closed
12/7/2010	1:16:21 PM	SiCl4 post valve closed
12/7/2010	1:16:21 PM	Main Vac valve closed
12/7/2010	1:16:21 PM	Bypass valve closed
12/7/2010	1:16:21 PM	Bubbler valve closed
12/7/2010	1:16:21 PM	Helium valve opened
12/7/2010	1:16:21 PM	Helium MFC set to  500.000000
12/7/2010	1:16:21 PM	H2 MFC set to  0.000000
12/7/2010	1:16:21 PM	BCl3 MFC set to  0.000000
12/7/2010	1:16:21 PM	PHl3 MFC set to  0.000000
12/7/2010	1:16:21 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:16:21 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:16:22 PM	Tube furnace set to 0
12/7/2010	1:16:29 PM	Helium valve closed
12/7/2010	1:16:29 PM	H2 valve closed
12/7/2010	1:16:29 PM	BCl3 valve closed
12/7/2010	1:16:29 PM	PH3 valve closed
12/7/2010	1:16:29 PM	SiCl4 pre valve closed
12/7/2010	1:16:29 PM	SiCl4 post valve closed
12/7/2010	1:16:29 PM	Main Vac valve closed
12/7/2010	1:16:29 PM	Bypass valve closed
12/7/2010	1:16:29 PM	Bubbler valve closed
12/7/2010	1:16:29 PM	Helium MFC set to  0.000000
12/7/2010	1:16:29 PM	H2 MFC set to  0.000000
12/7/2010	1:16:29 PM	BCl3 MFC set to  0.000000
12/7/2010	1:16:29 PM	PHl3 MFC set to  0.000000
12/7/2010	1:16:29 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:16:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:16:29 PM	Tube furnace set to 0
12/7/2010	1:16:30 PM	Run finished at 1:16 PM
12/7/2010	1:16:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	1:20:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	1:20:35 PM	Recipe started at 1:20 PM
12/7/2010	1:20:35 PM	Helium valve closed
12/7/2010	1:20:35 PM	H2 valve closed
12/7/2010	1:20:35 PM	BCl3 valve closed
12/7/2010	1:20:35 PM	PH3 valve closed
12/7/2010	1:20:35 PM	SiCl4 pre valve closed
12/7/2010	1:20:35 PM	SiCl4 post valve closed
12/7/2010	1:20:35 PM	Main Vac valve closed
12/7/2010	1:20:35 PM	Bubbler valve closed
12/7/2010	1:20:35 PM	Bypass valve opened
12/7/2010	1:20:35 PM	Helium MFC set to  0.000000
12/7/2010	1:20:35 PM	H2 MFC set to  0.000000
12/7/2010	1:20:35 PM	BCl3 MFC set to  0.000000
12/7/2010	1:20:35 PM	PHl3 MFC set to  0.000000
12/7/2010	1:20:35 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:20:35 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:20:35 PM	Tube furnace set to 0
12/7/2010	1:21:29 PM	Helium valve closed
12/7/2010	1:21:29 PM	H2 valve closed
12/7/2010	1:21:29 PM	BCl3 valve closed
12/7/2010	1:21:29 PM	PH3 valve closed
12/7/2010	1:21:29 PM	SiCl4 pre valve closed
12/7/2010	1:21:29 PM	SiCl4 post valve closed
12/7/2010	1:21:29 PM	Bubbler valve closed
12/7/2010	1:21:29 PM	Main Vac valve opened
12/7/2010	1:21:29 PM	Bypass valve opened
12/7/2010	1:21:29 PM	Helium MFC set to  0.000000
12/7/2010	1:21:29 PM	H2 MFC set to  0.000000
12/7/2010	1:21:29 PM	BCl3 MFC set to  0.000000
12/7/2010	1:21:29 PM	PHl3 MFC set to  0.000000
12/7/2010	1:21:29 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:21:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:21:29 PM	Tube furnace set to 0
12/7/2010	1:22:29 PM	H2 valve closed
12/7/2010	1:22:29 PM	BCl3 valve closed
12/7/2010	1:22:29 PM	PH3 valve closed
12/7/2010	1:22:29 PM	SiCl4 pre valve closed
12/7/2010	1:22:29 PM	SiCl4 post valve closed
12/7/2010	1:22:29 PM	Bubbler valve closed
12/7/2010	1:22:29 PM	Helium valve opened
12/7/2010	1:22:29 PM	Main Vac valve opened
12/7/2010	1:22:29 PM	Bypass valve opened
12/7/2010	1:22:29 PM	Helium MFC set to  100.000000
12/7/2010	1:22:29 PM	H2 MFC set to  0.000000
12/7/2010	1:22:29 PM	BCl3 MFC set to  0.000000
12/7/2010	1:22:29 PM	PHl3 MFC set to  0.000000
12/7/2010	1:22:29 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:22:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:22:30 PM	Tube furnace set to 0
12/7/2010	1:23:30 PM	Helium valve closed
12/7/2010	1:23:30 PM	H2 valve closed
12/7/2010	1:23:30 PM	BCl3 valve closed
12/7/2010	1:23:30 PM	PH3 valve closed
12/7/2010	1:23:30 PM	SiCl4 pre valve closed
12/7/2010	1:23:30 PM	SiCl4 post valve closed
12/7/2010	1:23:30 PM	Bubbler valve closed
12/7/2010	1:23:30 PM	Main Vac valve opened
12/7/2010	1:23:30 PM	Bypass valve opened
12/7/2010	1:23:30 PM	Helium MFC set to  0.000000
12/7/2010	1:23:30 PM	H2 MFC set to  0.000000
12/7/2010	1:23:30 PM	BCl3 MFC set to  0.000000
12/7/2010	1:23:30 PM	PHl3 MFC set to  0.000000
12/7/2010	1:23:30 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:23:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:23:30 PM	Tube furnace set to 0
12/7/2010	1:24:30 PM	H2 valve closed
12/7/2010	1:24:30 PM	BCl3 valve closed
12/7/2010	1:24:30 PM	PH3 valve closed
12/7/2010	1:24:30 PM	SiCl4 pre valve closed
12/7/2010	1:24:30 PM	SiCl4 post valve closed
12/7/2010	1:24:30 PM	Bubbler valve closed
12/7/2010	1:24:30 PM	Helium valve opened
12/7/2010	1:24:30 PM	Main Vac valve opened
12/7/2010	1:24:30 PM	Bypass valve opened
12/7/2010	1:24:30 PM	Helium MFC set to  100.000000
12/7/2010	1:24:30 PM	H2 MFC set to  0.000000
12/7/2010	1:24:30 PM	BCl3 MFC set to  0.000000
12/7/2010	1:24:30 PM	PHl3 MFC set to  0.000000
12/7/2010	1:24:30 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:24:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:24:30 PM	Tube furnace set to 0
12/7/2010	1:25:30 PM	Helium valve closed
12/7/2010	1:25:30 PM	H2 valve closed
12/7/2010	1:25:30 PM	BCl3 valve closed
12/7/2010	1:25:30 PM	PH3 valve closed
12/7/2010	1:25:30 PM	SiCl4 pre valve closed
12/7/2010	1:25:30 PM	SiCl4 post valve closed
12/7/2010	1:25:30 PM	Bubbler valve closed
12/7/2010	1:25:30 PM	Main Vac valve opened
12/7/2010	1:25:30 PM	Bypass valve opened
12/7/2010	1:25:30 PM	Helium MFC set to  0.000000
12/7/2010	1:25:30 PM	H2 MFC set to  0.000000
12/7/2010	1:25:30 PM	BCl3 MFC set to  0.000000
12/7/2010	1:25:30 PM	PHl3 MFC set to  0.000000
12/7/2010	1:25:30 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:25:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:25:30 PM	Tube furnace set to 0
12/7/2010	1:26:30 PM	H2 valve closed
12/7/2010	1:26:30 PM	BCl3 valve closed
12/7/2010	1:26:30 PM	PH3 valve closed
12/7/2010	1:26:30 PM	SiCl4 pre valve closed
12/7/2010	1:26:30 PM	SiCl4 post valve closed
12/7/2010	1:26:30 PM	Bubbler valve closed
12/7/2010	1:26:30 PM	Helium valve opened
12/7/2010	1:26:30 PM	Main Vac valve opened
12/7/2010	1:26:30 PM	Bypass valve opened
12/7/2010	1:26:30 PM	Helium MFC set to  100.000000
12/7/2010	1:26:30 PM	H2 MFC set to  0.000000
12/7/2010	1:26:30 PM	BCl3 MFC set to  0.000000
12/7/2010	1:26:30 PM	PHl3 MFC set to  0.000000
12/7/2010	1:26:30 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:26:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:26:30 PM	Tube furnace set to 0
12/7/2010	1:27:30 PM	Helium valve closed
12/7/2010	1:27:30 PM	H2 valve closed
12/7/2010	1:27:30 PM	BCl3 valve closed
12/7/2010	1:27:30 PM	PH3 valve closed
12/7/2010	1:27:30 PM	SiCl4 pre valve closed
12/7/2010	1:27:30 PM	SiCl4 post valve closed
12/7/2010	1:27:30 PM	Bubbler valve closed
12/7/2010	1:27:30 PM	Main Vac valve opened
12/7/2010	1:27:30 PM	Bypass valve opened
12/7/2010	1:27:30 PM	Helium MFC set to  0.000000
12/7/2010	1:27:30 PM	H2 MFC set to  0.000000
12/7/2010	1:27:30 PM	BCl3 MFC set to  0.000000
12/7/2010	1:27:30 PM	PHl3 MFC set to  0.000000
12/7/2010	1:27:30 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:27:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:27:31 PM	Tube furnace set to 0
12/7/2010	1:28:31 PM	H2 valve closed
12/7/2010	1:28:31 PM	BCl3 valve closed
12/7/2010	1:28:31 PM	PH3 valve closed
12/7/2010	1:28:31 PM	SiCl4 pre valve closed
12/7/2010	1:28:31 PM	SiCl4 post valve closed
12/7/2010	1:28:31 PM	Bubbler valve closed
12/7/2010	1:28:31 PM	Helium valve opened
12/7/2010	1:28:31 PM	Main Vac valve opened
12/7/2010	1:28:31 PM	Bypass valve opened
12/7/2010	1:28:31 PM	Helium MFC set to  100.000000
12/7/2010	1:28:31 PM	H2 MFC set to  0.000000
12/7/2010	1:28:31 PM	BCl3 MFC set to  0.000000
12/7/2010	1:28:31 PM	PHl3 MFC set to  0.000000
12/7/2010	1:28:31 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:28:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:28:31 PM	Tube furnace set to 0
12/7/2010	1:29:31 PM	Helium valve closed
12/7/2010	1:29:31 PM	H2 valve closed
12/7/2010	1:29:31 PM	BCl3 valve closed
12/7/2010	1:29:31 PM	PH3 valve closed
12/7/2010	1:29:31 PM	SiCl4 pre valve closed
12/7/2010	1:29:31 PM	SiCl4 post valve closed
12/7/2010	1:29:31 PM	Bubbler valve closed
12/7/2010	1:29:31 PM	Main Vac valve opened
12/7/2010	1:29:31 PM	Bypass valve opened
12/7/2010	1:29:31 PM	Helium MFC set to  0.000000
12/7/2010	1:29:31 PM	H2 MFC set to  0.000000
12/7/2010	1:29:31 PM	BCl3 MFC set to  0.000000
12/7/2010	1:29:31 PM	PHl3 MFC set to  0.000000
12/7/2010	1:29:31 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:29:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:29:31 PM	Tube furnace set to 0
12/7/2010	1:30:31 PM	H2 valve closed
12/7/2010	1:30:31 PM	BCl3 valve closed
12/7/2010	1:30:31 PM	PH3 valve closed
12/7/2010	1:30:31 PM	SiCl4 pre valve closed
12/7/2010	1:30:31 PM	SiCl4 post valve closed
12/7/2010	1:30:31 PM	Bubbler valve closed
12/7/2010	1:30:31 PM	Helium valve opened
12/7/2010	1:30:31 PM	Main Vac valve opened
12/7/2010	1:30:31 PM	Bypass valve opened
12/7/2010	1:30:31 PM	Helium MFC set to  100.000000
12/7/2010	1:30:31 PM	H2 MFC set to  0.000000
12/7/2010	1:30:31 PM	BCl3 MFC set to  0.000000
12/7/2010	1:30:31 PM	PHl3 MFC set to  0.000000
12/7/2010	1:30:31 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:30:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:30:31 PM	Tube furnace set to 0
12/7/2010	1:31:31 PM	Helium valve closed
12/7/2010	1:31:31 PM	H2 valve closed
12/7/2010	1:31:31 PM	BCl3 valve closed
12/7/2010	1:31:31 PM	PH3 valve closed
12/7/2010	1:31:31 PM	SiCl4 pre valve closed
12/7/2010	1:31:31 PM	SiCl4 post valve closed
12/7/2010	1:31:31 PM	Bubbler valve closed
12/7/2010	1:31:31 PM	Main Vac valve opened
12/7/2010	1:31:31 PM	Bypass valve opened
12/7/2010	1:31:31 PM	Helium MFC set to  0.000000
12/7/2010	1:31:31 PM	H2 MFC set to  0.000000
12/7/2010	1:31:31 PM	BCl3 MFC set to  0.000000
12/7/2010	1:31:31 PM	PHl3 MFC set to  0.000000
12/7/2010	1:31:31 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:31:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:31:31 PM	Tube furnace set to 0
12/7/2010	1:32:31 PM	H2 valve closed
12/7/2010	1:32:31 PM	BCl3 valve closed
12/7/2010	1:32:31 PM	PH3 valve closed
12/7/2010	1:32:31 PM	SiCl4 pre valve closed
12/7/2010	1:32:31 PM	SiCl4 post valve closed
12/7/2010	1:32:31 PM	Bubbler valve closed
12/7/2010	1:32:31 PM	Helium valve opened
12/7/2010	1:32:31 PM	Main Vac valve opened
12/7/2010	1:32:31 PM	Bypass valve opened
12/7/2010	1:32:31 PM	Helium MFC set to  100.000000
12/7/2010	1:32:31 PM	H2 MFC set to  0.000000
12/7/2010	1:32:31 PM	BCl3 MFC set to  0.000000
12/7/2010	1:32:31 PM	PHl3 MFC set to  0.000000
12/7/2010	1:32:31 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:32:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:32:31 PM	Tube furnace set to 0
12/7/2010	1:33:32 PM	Helium valve closed
12/7/2010	1:33:32 PM	H2 valve closed
12/7/2010	1:33:32 PM	BCl3 valve closed
12/7/2010	1:33:32 PM	PH3 valve closed
12/7/2010	1:33:32 PM	SiCl4 pre valve closed
12/7/2010	1:33:32 PM	SiCl4 post valve closed
12/7/2010	1:33:32 PM	Bubbler valve closed
12/7/2010	1:33:32 PM	Main Vac valve opened
12/7/2010	1:33:32 PM	Bypass valve opened
12/7/2010	1:33:32 PM	Helium MFC set to  0.000000
12/7/2010	1:33:32 PM	H2 MFC set to  0.000000
12/7/2010	1:33:32 PM	BCl3 MFC set to  0.000000
12/7/2010	1:33:32 PM	PHl3 MFC set to  0.000000
12/7/2010	1:33:32 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:33:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:33:32 PM	Tube furnace set to 0
12/7/2010	1:34:32 PM	H2 valve closed
12/7/2010	1:34:32 PM	BCl3 valve closed
12/7/2010	1:34:32 PM	PH3 valve closed
12/7/2010	1:34:32 PM	SiCl4 pre valve closed
12/7/2010	1:34:32 PM	SiCl4 post valve closed
12/7/2010	1:34:32 PM	Bubbler valve closed
12/7/2010	1:34:32 PM	Helium valve opened
12/7/2010	1:34:32 PM	Main Vac valve opened
12/7/2010	1:34:32 PM	Bypass valve opened
12/7/2010	1:34:32 PM	Helium MFC set to  100.000000
12/7/2010	1:34:32 PM	H2 MFC set to  0.000000
12/7/2010	1:34:32 PM	BCl3 MFC set to  0.000000
12/7/2010	1:34:32 PM	PHl3 MFC set to  0.000000
12/7/2010	1:34:32 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:34:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:34:32 PM	Tube furnace set to 0
12/7/2010	1:35:32 PM	Helium valve closed
12/7/2010	1:35:32 PM	H2 valve closed
12/7/2010	1:35:32 PM	BCl3 valve closed
12/7/2010	1:35:32 PM	PH3 valve closed
12/7/2010	1:35:32 PM	SiCl4 pre valve closed
12/7/2010	1:35:32 PM	SiCl4 post valve closed
12/7/2010	1:35:32 PM	Bubbler valve closed
12/7/2010	1:35:32 PM	Main Vac valve opened
12/7/2010	1:35:32 PM	Bypass valve opened
12/7/2010	1:35:32 PM	Helium MFC set to  0.000000
12/7/2010	1:35:32 PM	H2 MFC set to  0.000000
12/7/2010	1:35:32 PM	BCl3 MFC set to  0.000000
12/7/2010	1:35:32 PM	PHl3 MFC set to  0.000000
12/7/2010	1:35:32 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:35:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:35:32 PM	Tube furnace set to 0
12/7/2010	1:36:32 PM	H2 valve closed
12/7/2010	1:36:32 PM	BCl3 valve closed
12/7/2010	1:36:32 PM	PH3 valve closed
12/7/2010	1:36:32 PM	SiCl4 pre valve closed
12/7/2010	1:36:32 PM	SiCl4 post valve closed
12/7/2010	1:36:32 PM	Bubbler valve closed
12/7/2010	1:36:32 PM	Helium valve opened
12/7/2010	1:36:32 PM	Main Vac valve opened
12/7/2010	1:36:32 PM	Bypass valve opened
12/7/2010	1:36:32 PM	Helium MFC set to  100.000000
12/7/2010	1:36:32 PM	H2 MFC set to  0.000000
12/7/2010	1:36:32 PM	BCl3 MFC set to  0.000000
12/7/2010	1:36:32 PM	PHl3 MFC set to  0.000000
12/7/2010	1:36:32 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:36:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:36:32 PM	Tube furnace set to 0
12/7/2010	1:37:32 PM	Helium valve closed
12/7/2010	1:37:32 PM	H2 valve closed
12/7/2010	1:37:32 PM	BCl3 valve closed
12/7/2010	1:37:32 PM	PH3 valve closed
12/7/2010	1:37:32 PM	SiCl4 pre valve closed
12/7/2010	1:37:32 PM	SiCl4 post valve closed
12/7/2010	1:37:32 PM	Bubbler valve closed
12/7/2010	1:37:32 PM	Main Vac valve opened
12/7/2010	1:37:32 PM	Bypass valve opened
12/7/2010	1:37:32 PM	Helium MFC set to  0.000000
12/7/2010	1:37:32 PM	H2 MFC set to  0.000000
12/7/2010	1:37:32 PM	BCl3 MFC set to  0.000000
12/7/2010	1:37:32 PM	PHl3 MFC set to  0.000000
12/7/2010	1:37:32 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:37:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:37:32 PM	Tube furnace set to 0
12/7/2010	1:38:32 PM	H2 valve closed
12/7/2010	1:38:32 PM	BCl3 valve closed
12/7/2010	1:38:32 PM	PH3 valve closed
12/7/2010	1:38:32 PM	SiCl4 pre valve closed
12/7/2010	1:38:32 PM	SiCl4 post valve closed
12/7/2010	1:38:33 PM	Bubbler valve closed
12/7/2010	1:38:33 PM	Helium valve opened
12/7/2010	1:38:33 PM	Main Vac valve opened
12/7/2010	1:38:33 PM	Bypass valve opened
12/7/2010	1:38:33 PM	Helium MFC set to  100.000000
12/7/2010	1:38:33 PM	H2 MFC set to  0.000000
12/7/2010	1:38:33 PM	BCl3 MFC set to  0.000000
12/7/2010	1:38:33 PM	PHl3 MFC set to  0.000000
12/7/2010	1:38:33 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:38:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:38:33 PM	Tube furnace set to 0
12/7/2010	1:39:33 PM	Helium valve closed
12/7/2010	1:39:33 PM	H2 valve closed
12/7/2010	1:39:33 PM	BCl3 valve closed
12/7/2010	1:39:33 PM	PH3 valve closed
12/7/2010	1:39:33 PM	SiCl4 pre valve closed
12/7/2010	1:39:33 PM	SiCl4 post valve closed
12/7/2010	1:39:33 PM	Bubbler valve closed
12/7/2010	1:39:33 PM	Main Vac valve opened
12/7/2010	1:39:33 PM	Bypass valve opened
12/7/2010	1:39:33 PM	Helium MFC set to  0.000000
12/7/2010	1:39:33 PM	H2 MFC set to  0.000000
12/7/2010	1:39:33 PM	BCl3 MFC set to  0.000000
12/7/2010	1:39:33 PM	PHl3 MFC set to  0.000000
12/7/2010	1:39:33 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:39:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:39:33 PM	Tube furnace set to 0
12/7/2010	1:40:33 PM	H2 valve closed
12/7/2010	1:40:33 PM	BCl3 valve closed
12/7/2010	1:40:33 PM	PH3 valve closed
12/7/2010	1:40:33 PM	SiCl4 pre valve closed
12/7/2010	1:40:33 PM	SiCl4 post valve closed
12/7/2010	1:40:33 PM	Bubbler valve closed
12/7/2010	1:40:33 PM	Helium valve opened
12/7/2010	1:40:33 PM	Main Vac valve opened
12/7/2010	1:40:33 PM	Bypass valve opened
12/7/2010	1:40:33 PM	Helium MFC set to  100.000000
12/7/2010	1:40:33 PM	H2 MFC set to  0.000000
12/7/2010	1:40:33 PM	BCl3 MFC set to  0.000000
12/7/2010	1:40:33 PM	PHl3 MFC set to  0.000000
12/7/2010	1:40:33 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:40:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:40:33 PM	Tube furnace set to 0
12/7/2010	1:41:33 PM	Helium valve closed
12/7/2010	1:41:33 PM	H2 valve closed
12/7/2010	1:41:33 PM	BCl3 valve closed
12/7/2010	1:41:33 PM	PH3 valve closed
12/7/2010	1:41:33 PM	SiCl4 pre valve closed
12/7/2010	1:41:33 PM	SiCl4 post valve closed
12/7/2010	1:41:33 PM	Bubbler valve closed
12/7/2010	1:41:33 PM	Main Vac valve opened
12/7/2010	1:41:33 PM	Bypass valve opened
12/7/2010	1:41:33 PM	Helium MFC set to  0.000000
12/7/2010	1:41:33 PM	H2 MFC set to  0.000000
12/7/2010	1:41:33 PM	BCl3 MFC set to  0.000000
12/7/2010	1:41:33 PM	PHl3 MFC set to  0.000000
12/7/2010	1:41:33 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:41:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:41:33 PM	Tube furnace set to 0
12/7/2010	1:41:34 PM	Run finished at 1:41 PM
12/7/2010	1:41:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	1:45:48 PM	Recipe started at 1:45 PM
12/7/2010	1:45:48 PM	Helium valve closed
12/7/2010	1:45:48 PM	BCl3 valve closed
12/7/2010	1:45:48 PM	PH3 valve closed
12/7/2010	1:45:48 PM	SiCl4 pre valve closed
12/7/2010	1:45:48 PM	SiCl4 post valve closed
12/7/2010	1:45:48 PM	Main Vac valve closed
12/7/2010	1:45:48 PM	Bypass valve closed
12/7/2010	1:45:48 PM	Bubbler valve closed
12/7/2010	1:45:48 PM	H2 valve opened
12/7/2010	1:45:48 PM	Helium MFC set to  0.000000
12/7/2010	1:45:48 PM	H2 MFC set to  500.000000
12/7/2010	1:45:48 PM	BCl3 MFC set to  0.000000
12/7/2010	1:45:48 PM	PHl3 MFC set to  0.000000
12/7/2010	1:45:48 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:45:48 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:45:48 PM	Tube furnace set to 100
12/7/2010	1:47:08 PM	Helium valve closed
12/7/2010	1:47:08 PM	BCl3 valve closed
12/7/2010	1:47:08 PM	PH3 valve closed
12/7/2010	1:47:08 PM	SiCl4 pre valve closed
12/7/2010	1:47:08 PM	SiCl4 post valve closed
12/7/2010	1:47:08 PM	Main Vac valve closed
12/7/2010	1:47:08 PM	Bypass valve closed
12/7/2010	1:47:08 PM	H2 valve opened
12/7/2010	1:47:08 PM	Bubbler valve opened
12/7/2010	1:47:08 PM	Helium MFC set to  0.000000
12/7/2010	1:47:08 PM	H2 MFC set to  500.000000
12/7/2010	1:47:08 PM	BCl3 MFC set to  0.000000
12/7/2010	1:47:08 PM	PHl3 MFC set to  0.000000
12/7/2010	1:47:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	1:47:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	1:47:08 PM	Tube furnace set to 1000
12/7/2010	2:07:08 PM	Helium valve closed
12/7/2010	2:07:08 PM	PH3 valve closed
12/7/2010	2:07:08 PM	Main Vac valve closed
12/7/2010	2:07:08 PM	Bypass valve closed
12/7/2010	2:07:08 PM	H2 valve opened
12/7/2010	2:07:08 PM	BCl3 valve opened
12/7/2010	2:07:08 PM	SiCl4 pre valve opened
12/7/2010	2:07:08 PM	SiCl4 post valve opened
12/7/2010	2:07:08 PM	Bubbler valve opened
12/7/2010	2:07:08 PM	Helium MFC set to  0.000000
12/7/2010	2:07:08 PM	H2 MFC set to  500.000000
12/7/2010	2:07:08 PM	BCl3 MFC set to  10.000000
12/7/2010	2:07:08 PM	PHl3 MFC set to  0.000000
12/7/2010	2:07:08 PM	SiCl4 MFC set to  50.000000
12/7/2010	2:07:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	2:07:08 PM	Tube furnace set to 1000
12/7/2010	2:19:08 PM	H2 valve closed
12/7/2010	2:19:08 PM	BCl3 valve closed
12/7/2010	2:19:08 PM	PH3 valve closed
12/7/2010	2:19:08 PM	SiCl4 pre valve closed
12/7/2010	2:19:08 PM	SiCl4 post valve closed
12/7/2010	2:19:08 PM	Main Vac valve closed
12/7/2010	2:19:08 PM	Bypass valve closed
12/7/2010	2:19:08 PM	Helium valve opened
12/7/2010	2:19:08 PM	Bubbler valve opened
12/7/2010	2:19:08 PM	Helium MFC set to  500.000000
12/7/2010	2:19:08 PM	H2 MFC set to  0.000000
12/7/2010	2:19:08 PM	BCl3 MFC set to  0.000000
12/7/2010	2:19:08 PM	PHl3 MFC set to  0.000000
12/7/2010	2:19:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	2:19:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	2:19:08 PM	Tube furnace set to 0
12/7/2010	2:39:08 PM	Helium valve closed
12/7/2010	2:39:08 PM	H2 valve closed
12/7/2010	2:39:08 PM	BCl3 valve closed
12/7/2010	2:39:08 PM	PH3 valve closed
12/7/2010	2:39:08 PM	SiCl4 pre valve closed
12/7/2010	2:39:08 PM	SiCl4 post valve closed
12/7/2010	2:39:08 PM	Main Vac valve closed
12/7/2010	2:39:08 PM	Bypass valve closed
12/7/2010	2:39:08 PM	Bubbler valve closed
12/7/2010	2:39:08 PM	Helium MFC set to  500.000000
12/7/2010	2:39:08 PM	H2 MFC set to  0.000000
12/7/2010	2:39:08 PM	BCl3 MFC set to  0.000000
12/7/2010	2:39:08 PM	PHl3 MFC set to  0.000000
12/7/2010	2:39:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	2:39:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	2:39:08 PM	Tube furnace set to 0
12/7/2010	2:39:09 PM	Run finished at 2:39 PM
12/7/2010	3:43:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	3:43:24 PM	Recipe started at 3:43 PM
12/7/2010	3:43:24 PM	H2 valve closed
12/7/2010	3:43:24 PM	BCl3 valve closed
12/7/2010	3:43:24 PM	PH3 valve closed
12/7/2010	3:43:24 PM	SiCl4 pre valve closed
12/7/2010	3:43:24 PM	SiCl4 post valve closed
12/7/2010	3:43:24 PM	Main Vac valve closed
12/7/2010	3:43:24 PM	Bypass valve closed
12/7/2010	3:43:24 PM	Bubbler valve closed
12/7/2010	3:43:24 PM	Helium valve opened
12/7/2010	3:43:24 PM	Helium MFC set to  500.000000
12/7/2010	3:43:24 PM	H2 MFC set to  0.000000
12/7/2010	3:43:24 PM	BCl3 MFC set to  0.000000
12/7/2010	3:43:24 PM	PHl3 MFC set to  0.000000
12/7/2010	3:43:24 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:43:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:43:24 PM	Tube furnace set to 0
12/7/2010	3:43:33 PM	Helium valve closed
12/7/2010	3:43:33 PM	H2 valve closed
12/7/2010	3:43:33 PM	BCl3 valve closed
12/7/2010	3:43:33 PM	PH3 valve closed
12/7/2010	3:43:33 PM	SiCl4 pre valve closed
12/7/2010	3:43:33 PM	SiCl4 post valve closed
12/7/2010	3:43:33 PM	Main Vac valve closed
12/7/2010	3:43:33 PM	Bypass valve closed
12/7/2010	3:43:33 PM	Bubbler valve closed
12/7/2010	3:43:33 PM	Helium MFC set to  0.000000
12/7/2010	3:43:33 PM	H2 MFC set to  0.000000
12/7/2010	3:43:33 PM	BCl3 MFC set to  0.000000
12/7/2010	3:43:33 PM	PHl3 MFC set to  0.000000
12/7/2010	3:43:33 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:43:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:43:33 PM	Tube furnace set to 0
12/7/2010	3:43:33 PM	Run finished at 3:43 PM
12/7/2010	3:43:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2010	3:46:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	3:47:12 PM	Recipe started at 3:47 PM
12/7/2010	3:47:12 PM	Helium valve closed
12/7/2010	3:47:12 PM	H2 valve closed
12/7/2010	3:47:12 PM	BCl3 valve closed
12/7/2010	3:47:12 PM	PH3 valve closed
12/7/2010	3:47:12 PM	SiCl4 pre valve closed
12/7/2010	3:47:12 PM	SiCl4 post valve closed
12/7/2010	3:47:12 PM	Main Vac valve closed
12/7/2010	3:47:12 PM	Bubbler valve closed
12/7/2010	3:47:12 PM	Bypass valve opened
12/7/2010	3:47:12 PM	Helium MFC set to  0.000000
12/7/2010	3:47:12 PM	H2 MFC set to  0.000000
12/7/2010	3:47:12 PM	BCl3 MFC set to  0.000000
12/7/2010	3:47:12 PM	PHl3 MFC set to  0.000000
12/7/2010	3:47:12 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:47:12 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:47:12 PM	Tube furnace set to 0
12/7/2010	3:48:07 PM	Helium valve closed
12/7/2010	3:48:07 PM	H2 valve closed
12/7/2010	3:48:07 PM	BCl3 valve closed
12/7/2010	3:48:07 PM	PH3 valve closed
12/7/2010	3:48:07 PM	SiCl4 pre valve closed
12/7/2010	3:48:07 PM	SiCl4 post valve closed
12/7/2010	3:48:07 PM	Bubbler valve closed
12/7/2010	3:48:07 PM	Main Vac valve opened
12/7/2010	3:48:07 PM	Bypass valve opened
12/7/2010	3:48:07 PM	Helium MFC set to  0.000000
12/7/2010	3:48:07 PM	H2 MFC set to  0.000000
12/7/2010	3:48:07 PM	BCl3 MFC set to  0.000000
12/7/2010	3:48:07 PM	PHl3 MFC set to  0.000000
12/7/2010	3:48:07 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:48:07 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:48:07 PM	Tube furnace set to 0
12/7/2010	3:49:07 PM	H2 valve closed
12/7/2010	3:49:07 PM	BCl3 valve closed
12/7/2010	3:49:07 PM	PH3 valve closed
12/7/2010	3:49:07 PM	SiCl4 pre valve closed
12/7/2010	3:49:07 PM	SiCl4 post valve closed
12/7/2010	3:49:07 PM	Bubbler valve closed
12/7/2010	3:49:07 PM	Helium valve opened
12/7/2010	3:49:07 PM	Main Vac valve opened
12/7/2010	3:49:07 PM	Bypass valve opened
12/7/2010	3:49:07 PM	Helium MFC set to  100.000000
12/7/2010	3:49:07 PM	H2 MFC set to  0.000000
12/7/2010	3:49:07 PM	BCl3 MFC set to  0.000000
12/7/2010	3:49:07 PM	PHl3 MFC set to  0.000000
12/7/2010	3:49:07 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:49:07 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:49:07 PM	Tube furnace set to 0
12/7/2010	3:50:07 PM	Helium valve closed
12/7/2010	3:50:07 PM	H2 valve closed
12/7/2010	3:50:07 PM	BCl3 valve closed
12/7/2010	3:50:07 PM	PH3 valve closed
12/7/2010	3:50:07 PM	SiCl4 pre valve closed
12/7/2010	3:50:07 PM	SiCl4 post valve closed
12/7/2010	3:50:07 PM	Bubbler valve closed
12/7/2010	3:50:07 PM	Main Vac valve opened
12/7/2010	3:50:07 PM	Bypass valve opened
12/7/2010	3:50:07 PM	Helium MFC set to  0.000000
12/7/2010	3:50:07 PM	H2 MFC set to  0.000000
12/7/2010	3:50:07 PM	BCl3 MFC set to  0.000000
12/7/2010	3:50:07 PM	PHl3 MFC set to  0.000000
12/7/2010	3:50:07 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:50:07 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:50:08 PM	Tube furnace set to 0
12/7/2010	3:51:08 PM	H2 valve closed
12/7/2010	3:51:08 PM	BCl3 valve closed
12/7/2010	3:51:08 PM	PH3 valve closed
12/7/2010	3:51:08 PM	SiCl4 pre valve closed
12/7/2010	3:51:08 PM	SiCl4 post valve closed
12/7/2010	3:51:08 PM	Bubbler valve closed
12/7/2010	3:51:08 PM	Helium valve opened
12/7/2010	3:51:08 PM	Main Vac valve opened
12/7/2010	3:51:08 PM	Bypass valve opened
12/7/2010	3:51:08 PM	Helium MFC set to  100.000000
12/7/2010	3:51:08 PM	H2 MFC set to  0.000000
12/7/2010	3:51:08 PM	BCl3 MFC set to  0.000000
12/7/2010	3:51:08 PM	PHl3 MFC set to  0.000000
12/7/2010	3:51:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:51:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:51:08 PM	Tube furnace set to 0
12/7/2010	3:52:08 PM	Helium valve closed
12/7/2010	3:52:08 PM	H2 valve closed
12/7/2010	3:52:08 PM	BCl3 valve closed
12/7/2010	3:52:08 PM	PH3 valve closed
12/7/2010	3:52:08 PM	SiCl4 pre valve closed
12/7/2010	3:52:08 PM	SiCl4 post valve closed
12/7/2010	3:52:08 PM	Bubbler valve closed
12/7/2010	3:52:08 PM	Main Vac valve opened
12/7/2010	3:52:08 PM	Bypass valve opened
12/7/2010	3:52:08 PM	Helium MFC set to  0.000000
12/7/2010	3:52:08 PM	H2 MFC set to  0.000000
12/7/2010	3:52:08 PM	BCl3 MFC set to  0.000000
12/7/2010	3:52:08 PM	PHl3 MFC set to  0.000000
12/7/2010	3:52:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:52:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:52:08 PM	Tube furnace set to 0
12/7/2010	3:53:08 PM	H2 valve closed
12/7/2010	3:53:08 PM	BCl3 valve closed
12/7/2010	3:53:08 PM	PH3 valve closed
12/7/2010	3:53:08 PM	SiCl4 pre valve closed
12/7/2010	3:53:08 PM	SiCl4 post valve closed
12/7/2010	3:53:08 PM	Bubbler valve closed
12/7/2010	3:53:08 PM	Helium valve opened
12/7/2010	3:53:08 PM	Main Vac valve opened
12/7/2010	3:53:08 PM	Bypass valve opened
12/7/2010	3:53:08 PM	Helium MFC set to  100.000000
12/7/2010	3:53:08 PM	H2 MFC set to  0.000000
12/7/2010	3:53:08 PM	BCl3 MFC set to  0.000000
12/7/2010	3:53:08 PM	PHl3 MFC set to  0.000000
12/7/2010	3:53:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:53:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:53:08 PM	Tube furnace set to 0
12/7/2010	3:54:08 PM	Helium valve closed
12/7/2010	3:54:08 PM	H2 valve closed
12/7/2010	3:54:08 PM	BCl3 valve closed
12/7/2010	3:54:08 PM	PH3 valve closed
12/7/2010	3:54:08 PM	SiCl4 pre valve closed
12/7/2010	3:54:08 PM	SiCl4 post valve closed
12/7/2010	3:54:08 PM	Bubbler valve closed
12/7/2010	3:54:08 PM	Main Vac valve opened
12/7/2010	3:54:08 PM	Bypass valve opened
12/7/2010	3:54:08 PM	Helium MFC set to  0.000000
12/7/2010	3:54:08 PM	H2 MFC set to  0.000000
12/7/2010	3:54:08 PM	BCl3 MFC set to  0.000000
12/7/2010	3:54:08 PM	PHl3 MFC set to  0.000000
12/7/2010	3:54:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:54:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:54:08 PM	Tube furnace set to 0
12/7/2010	3:55:08 PM	H2 valve closed
12/7/2010	3:55:08 PM	BCl3 valve closed
12/7/2010	3:55:08 PM	PH3 valve closed
12/7/2010	3:55:08 PM	SiCl4 pre valve closed
12/7/2010	3:55:08 PM	SiCl4 post valve closed
12/7/2010	3:55:08 PM	Bubbler valve closed
12/7/2010	3:55:08 PM	Helium valve opened
12/7/2010	3:55:08 PM	Main Vac valve opened
12/7/2010	3:55:08 PM	Bypass valve opened
12/7/2010	3:55:08 PM	Helium MFC set to  100.000000
12/7/2010	3:55:08 PM	H2 MFC set to  0.000000
12/7/2010	3:55:08 PM	BCl3 MFC set to  0.000000
12/7/2010	3:55:08 PM	PHl3 MFC set to  0.000000
12/7/2010	3:55:08 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:55:08 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:55:09 PM	Tube furnace set to 0
12/7/2010	3:56:09 PM	Helium valve closed
12/7/2010	3:56:09 PM	H2 valve closed
12/7/2010	3:56:09 PM	BCl3 valve closed
12/7/2010	3:56:09 PM	PH3 valve closed
12/7/2010	3:56:09 PM	SiCl4 pre valve closed
12/7/2010	3:56:09 PM	SiCl4 post valve closed
12/7/2010	3:56:09 PM	Bubbler valve closed
12/7/2010	3:56:09 PM	Main Vac valve opened
12/7/2010	3:56:09 PM	Bypass valve opened
12/7/2010	3:56:09 PM	Helium MFC set to  0.000000
12/7/2010	3:56:09 PM	H2 MFC set to  0.000000
12/7/2010	3:56:09 PM	BCl3 MFC set to  0.000000
12/7/2010	3:56:09 PM	PHl3 MFC set to  0.000000
12/7/2010	3:56:09 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:56:09 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:56:09 PM	Tube furnace set to 0
12/7/2010	3:57:09 PM	H2 valve closed
12/7/2010	3:57:09 PM	BCl3 valve closed
12/7/2010	3:57:09 PM	PH3 valve closed
12/7/2010	3:57:09 PM	SiCl4 pre valve closed
12/7/2010	3:57:09 PM	SiCl4 post valve closed
12/7/2010	3:57:09 PM	Bubbler valve closed
12/7/2010	3:57:09 PM	Helium valve opened
12/7/2010	3:57:09 PM	Main Vac valve opened
12/7/2010	3:57:09 PM	Bypass valve opened
12/7/2010	3:57:09 PM	Helium MFC set to  100.000000
12/7/2010	3:57:09 PM	H2 MFC set to  0.000000
12/7/2010	3:57:09 PM	BCl3 MFC set to  0.000000
12/7/2010	3:57:09 PM	PHl3 MFC set to  0.000000
12/7/2010	3:57:09 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:57:09 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:57:09 PM	Tube furnace set to 0
12/7/2010	3:58:09 PM	Helium valve closed
12/7/2010	3:58:09 PM	H2 valve closed
12/7/2010	3:58:09 PM	BCl3 valve closed
12/7/2010	3:58:09 PM	PH3 valve closed
12/7/2010	3:58:09 PM	SiCl4 pre valve closed
12/7/2010	3:58:09 PM	SiCl4 post valve closed
12/7/2010	3:58:09 PM	Bubbler valve closed
12/7/2010	3:58:09 PM	Main Vac valve opened
12/7/2010	3:58:09 PM	Bypass valve opened
12/7/2010	3:58:09 PM	Helium MFC set to  0.000000
12/7/2010	3:58:09 PM	H2 MFC set to  0.000000
12/7/2010	3:58:09 PM	BCl3 MFC set to  0.000000
12/7/2010	3:58:09 PM	PHl3 MFC set to  0.000000
12/7/2010	3:58:09 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:58:09 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:58:09 PM	Tube furnace set to 0
12/7/2010	3:59:09 PM	H2 valve closed
12/7/2010	3:59:09 PM	BCl3 valve closed
12/7/2010	3:59:09 PM	PH3 valve closed
12/7/2010	3:59:09 PM	SiCl4 pre valve closed
12/7/2010	3:59:09 PM	SiCl4 post valve closed
12/7/2010	3:59:09 PM	Bubbler valve closed
12/7/2010	3:59:09 PM	Helium valve opened
12/7/2010	3:59:09 PM	Main Vac valve opened
12/7/2010	3:59:09 PM	Bypass valve opened
12/7/2010	3:59:09 PM	Helium MFC set to  100.000000
12/7/2010	3:59:09 PM	H2 MFC set to  0.000000
12/7/2010	3:59:09 PM	BCl3 MFC set to  0.000000
12/7/2010	3:59:09 PM	PHl3 MFC set to  0.000000
12/7/2010	3:59:09 PM	SiCl4 MFC set to  0.000000
12/7/2010	3:59:09 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	3:59:09 PM	Tube furnace set to 0
12/7/2010	4:00:09 PM	Helium valve closed
12/7/2010	4:00:09 PM	H2 valve closed
12/7/2010	4:00:09 PM	BCl3 valve closed
12/7/2010	4:00:09 PM	PH3 valve closed
12/7/2010	4:00:09 PM	SiCl4 pre valve closed
12/7/2010	4:00:09 PM	SiCl4 post valve closed
12/7/2010	4:00:09 PM	Bubbler valve closed
12/7/2010	4:00:09 PM	Main Vac valve opened
12/7/2010	4:00:09 PM	Bypass valve opened
12/7/2010	4:00:09 PM	Helium MFC set to  0.000000
12/7/2010	4:00:09 PM	H2 MFC set to  0.000000
12/7/2010	4:00:09 PM	BCl3 MFC set to  0.000000
12/7/2010	4:00:09 PM	PHl3 MFC set to  0.000000
12/7/2010	4:00:09 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:00:09 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:00:10 PM	Tube furnace set to 0
12/7/2010	4:01:10 PM	H2 valve closed
12/7/2010	4:01:10 PM	BCl3 valve closed
12/7/2010	4:01:10 PM	PH3 valve closed
12/7/2010	4:01:10 PM	SiCl4 pre valve closed
12/7/2010	4:01:10 PM	SiCl4 post valve closed
12/7/2010	4:01:10 PM	Bubbler valve closed
12/7/2010	4:01:10 PM	Helium valve opened
12/7/2010	4:01:10 PM	Main Vac valve opened
12/7/2010	4:01:10 PM	Bypass valve opened
12/7/2010	4:01:10 PM	Helium MFC set to  100.000000
12/7/2010	4:01:10 PM	H2 MFC set to  0.000000
12/7/2010	4:01:10 PM	BCl3 MFC set to  0.000000
12/7/2010	4:01:10 PM	PHl3 MFC set to  0.000000
12/7/2010	4:01:10 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:01:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:01:10 PM	Tube furnace set to 0
12/7/2010	4:02:10 PM	Helium valve closed
12/7/2010	4:02:10 PM	H2 valve closed
12/7/2010	4:02:10 PM	BCl3 valve closed
12/7/2010	4:02:10 PM	PH3 valve closed
12/7/2010	4:02:10 PM	SiCl4 pre valve closed
12/7/2010	4:02:10 PM	SiCl4 post valve closed
12/7/2010	4:02:10 PM	Bubbler valve closed
12/7/2010	4:02:10 PM	Main Vac valve opened
12/7/2010	4:02:10 PM	Bypass valve opened
12/7/2010	4:02:10 PM	Helium MFC set to  0.000000
12/7/2010	4:02:10 PM	H2 MFC set to  0.000000
12/7/2010	4:02:10 PM	BCl3 MFC set to  0.000000
12/7/2010	4:02:10 PM	PHl3 MFC set to  0.000000
12/7/2010	4:02:10 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:02:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:02:10 PM	Tube furnace set to 0
12/7/2010	4:03:10 PM	H2 valve closed
12/7/2010	4:03:10 PM	BCl3 valve closed
12/7/2010	4:03:10 PM	PH3 valve closed
12/7/2010	4:03:10 PM	SiCl4 pre valve closed
12/7/2010	4:03:10 PM	SiCl4 post valve closed
12/7/2010	4:03:10 PM	Bubbler valve closed
12/7/2010	4:03:10 PM	Helium valve opened
12/7/2010	4:03:10 PM	Main Vac valve opened
12/7/2010	4:03:10 PM	Bypass valve opened
12/7/2010	4:03:10 PM	Helium MFC set to  100.000000
12/7/2010	4:03:10 PM	H2 MFC set to  0.000000
12/7/2010	4:03:10 PM	BCl3 MFC set to  0.000000
12/7/2010	4:03:10 PM	PHl3 MFC set to  0.000000
12/7/2010	4:03:10 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:03:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:03:10 PM	Tube furnace set to 0
12/7/2010	4:04:10 PM	Helium valve closed
12/7/2010	4:04:10 PM	H2 valve closed
12/7/2010	4:04:10 PM	BCl3 valve closed
12/7/2010	4:04:10 PM	PH3 valve closed
12/7/2010	4:04:10 PM	SiCl4 pre valve closed
12/7/2010	4:04:10 PM	SiCl4 post valve closed
12/7/2010	4:04:10 PM	Bubbler valve closed
12/7/2010	4:04:10 PM	Main Vac valve opened
12/7/2010	4:04:10 PM	Bypass valve opened
12/7/2010	4:04:10 PM	Helium MFC set to  0.000000
12/7/2010	4:04:10 PM	H2 MFC set to  0.000000
12/7/2010	4:04:10 PM	BCl3 MFC set to  0.000000
12/7/2010	4:04:10 PM	PHl3 MFC set to  0.000000
12/7/2010	4:04:10 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:04:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:04:10 PM	Tube furnace set to 0
12/7/2010	4:05:10 PM	H2 valve closed
12/7/2010	4:05:10 PM	BCl3 valve closed
12/7/2010	4:05:10 PM	PH3 valve closed
12/7/2010	4:05:10 PM	SiCl4 pre valve closed
12/7/2010	4:05:10 PM	SiCl4 post valve closed
12/7/2010	4:05:10 PM	Bubbler valve closed
12/7/2010	4:05:10 PM	Helium valve opened
12/7/2010	4:05:10 PM	Main Vac valve opened
12/7/2010	4:05:10 PM	Bypass valve opened
12/7/2010	4:05:10 PM	Helium MFC set to  100.000000
12/7/2010	4:05:10 PM	H2 MFC set to  0.000000
12/7/2010	4:05:10 PM	BCl3 MFC set to  0.000000
12/7/2010	4:05:10 PM	PHl3 MFC set to  0.000000
12/7/2010	4:05:10 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:05:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:05:10 PM	Tube furnace set to 0
12/7/2010	4:06:11 PM	Helium valve closed
12/7/2010	4:06:11 PM	H2 valve closed
12/7/2010	4:06:11 PM	BCl3 valve closed
12/7/2010	4:06:11 PM	PH3 valve closed
12/7/2010	4:06:11 PM	SiCl4 pre valve closed
12/7/2010	4:06:11 PM	SiCl4 post valve closed
12/7/2010	4:06:11 PM	Bubbler valve closed
12/7/2010	4:06:11 PM	Main Vac valve opened
12/7/2010	4:06:11 PM	Bypass valve opened
12/7/2010	4:06:11 PM	Helium MFC set to  0.000000
12/7/2010	4:06:11 PM	H2 MFC set to  0.000000
12/7/2010	4:06:11 PM	BCl3 MFC set to  0.000000
12/7/2010	4:06:11 PM	PHl3 MFC set to  0.000000
12/7/2010	4:06:11 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:06:11 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:06:11 PM	Tube furnace set to 0
12/7/2010	4:07:11 PM	H2 valve closed
12/7/2010	4:07:11 PM	BCl3 valve closed
12/7/2010	4:07:11 PM	PH3 valve closed
12/7/2010	4:07:11 PM	SiCl4 pre valve closed
12/7/2010	4:07:11 PM	SiCl4 post valve closed
12/7/2010	4:07:11 PM	Bubbler valve closed
12/7/2010	4:07:11 PM	Helium valve opened
12/7/2010	4:07:11 PM	Main Vac valve opened
12/7/2010	4:07:11 PM	Bypass valve opened
12/7/2010	4:07:11 PM	Helium MFC set to  100.000000
12/7/2010	4:07:11 PM	H2 MFC set to  0.000000
12/7/2010	4:07:11 PM	BCl3 MFC set to  0.000000
12/7/2010	4:07:11 PM	PHl3 MFC set to  0.000000
12/7/2010	4:07:11 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:07:11 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:07:11 PM	Tube furnace set to 0
12/7/2010	4:08:11 PM	Helium valve closed
12/7/2010	4:08:11 PM	H2 valve closed
12/7/2010	4:08:11 PM	BCl3 valve closed
12/7/2010	4:08:11 PM	PH3 valve closed
12/7/2010	4:08:11 PM	SiCl4 pre valve closed
12/7/2010	4:08:11 PM	SiCl4 post valve closed
12/7/2010	4:08:11 PM	Bubbler valve closed
12/7/2010	4:08:11 PM	Main Vac valve opened
12/7/2010	4:08:11 PM	Bypass valve opened
12/7/2010	4:08:11 PM	Helium MFC set to  0.000000
12/7/2010	4:08:11 PM	H2 MFC set to  0.000000
12/7/2010	4:08:11 PM	BCl3 MFC set to  0.000000
12/7/2010	4:08:11 PM	PHl3 MFC set to  0.000000
12/7/2010	4:08:11 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:08:11 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:08:11 PM	Tube furnace set to 0
12/7/2010	4:08:12 PM	Run finished at 4:08 PM
12/7/2010	4:08:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/7/2010	4:31:43 PM	Recipe started at 4:31 PM
12/7/2010	4:31:43 PM	Helium valve closed
12/7/2010	4:31:43 PM	BCl3 valve closed
12/7/2010	4:31:43 PM	PH3 valve closed
12/7/2010	4:31:43 PM	SiCl4 pre valve closed
12/7/2010	4:31:43 PM	SiCl4 post valve closed
12/7/2010	4:31:43 PM	Main Vac valve closed
12/7/2010	4:31:43 PM	Bypass valve closed
12/7/2010	4:31:43 PM	Bubbler valve closed
12/7/2010	4:31:43 PM	H2 valve opened
12/7/2010	4:31:43 PM	Helium MFC set to  0.000000
12/7/2010	4:31:43 PM	H2 MFC set to  500.000000
12/7/2010	4:31:43 PM	BCl3 MFC set to  0.000000
12/7/2010	4:31:43 PM	PHl3 MFC set to  0.000000
12/7/2010	4:31:43 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:31:43 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:31:43 PM	Tube furnace set to 100
12/7/2010	4:33:04 PM	Helium valve closed
12/7/2010	4:33:04 PM	BCl3 valve closed
12/7/2010	4:33:04 PM	PH3 valve closed
12/7/2010	4:33:04 PM	SiCl4 pre valve closed
12/7/2010	4:33:04 PM	SiCl4 post valve closed
12/7/2010	4:33:04 PM	Main Vac valve closed
12/7/2010	4:33:04 PM	Bypass valve closed
12/7/2010	4:33:04 PM	H2 valve opened
12/7/2010	4:33:04 PM	Bubbler valve opened
12/7/2010	4:33:04 PM	Helium MFC set to  0.000000
12/7/2010	4:33:04 PM	H2 MFC set to  500.000000
12/7/2010	4:33:04 PM	BCl3 MFC set to  0.000000
12/7/2010	4:33:04 PM	PHl3 MFC set to  0.000000
12/7/2010	4:33:04 PM	SiCl4 MFC set to  0.000000
12/7/2010	4:33:04 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:33:05 PM	Tube furnace set to 1000
12/7/2010	4:53:04 PM	Helium valve closed
12/7/2010	4:53:04 PM	PH3 valve closed
12/7/2010	4:53:04 PM	Main Vac valve closed
12/7/2010	4:53:04 PM	Bypass valve closed
12/7/2010	4:53:04 PM	H2 valve opened
12/7/2010	4:53:04 PM	BCl3 valve opened
12/7/2010	4:53:05 PM	SiCl4 pre valve opened
12/7/2010	4:53:05 PM	SiCl4 post valve opened
12/7/2010	4:53:05 PM	Bubbler valve opened
12/7/2010	4:53:05 PM	Helium MFC set to  0.000000
12/7/2010	4:53:05 PM	H2 MFC set to  500.000000
12/7/2010	4:53:05 PM	BCl3 MFC set to  10.000000
12/7/2010	4:53:05 PM	PHl3 MFC set to  0.000000
12/7/2010	4:53:05 PM	SiCl4 MFC set to  50.000000
12/7/2010	4:53:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	4:53:05 PM	Tube furnace set to 1000
12/7/2010	5:05:05 PM	H2 valve closed
12/7/2010	5:05:05 PM	BCl3 valve closed
12/7/2010	5:05:05 PM	PH3 valve closed
12/7/2010	5:05:05 PM	SiCl4 pre valve closed
12/7/2010	5:05:05 PM	SiCl4 post valve closed
12/7/2010	5:05:05 PM	Main Vac valve closed
12/7/2010	5:05:05 PM	Bypass valve closed
12/7/2010	5:05:05 PM	Helium valve opened
12/7/2010	5:05:05 PM	Bubbler valve opened
12/7/2010	5:05:05 PM	Helium MFC set to  500.000000
12/7/2010	5:05:05 PM	H2 MFC set to  0.000000
12/7/2010	5:05:05 PM	BCl3 MFC set to  0.000000
12/7/2010	5:05:05 PM	PHl3 MFC set to  0.000000
12/7/2010	5:05:05 PM	SiCl4 MFC set to  0.000000
12/7/2010	5:05:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	5:05:05 PM	Tube furnace set to 0
12/7/2010	5:25:05 PM	Helium valve closed
12/7/2010	5:25:05 PM	H2 valve closed
12/7/2010	5:25:05 PM	BCl3 valve closed
12/7/2010	5:25:05 PM	PH3 valve closed
12/7/2010	5:25:05 PM	SiCl4 pre valve closed
12/7/2010	5:25:05 PM	SiCl4 post valve closed
12/7/2010	5:25:05 PM	Main Vac valve closed
12/7/2010	5:25:05 PM	Bypass valve closed
12/7/2010	5:25:05 PM	Bubbler valve closed
12/7/2010	5:25:05 PM	Helium MFC set to  500.000000
12/7/2010	5:25:05 PM	H2 MFC set to  0.000000
12/7/2010	5:25:05 PM	BCl3 MFC set to  0.000000
12/7/2010	5:25:05 PM	PHl3 MFC set to  0.000000
12/7/2010	5:25:05 PM	SiCl4 MFC set to  0.000000
12/7/2010	5:25:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	5:25:05 PM	Tube furnace set to 0
12/7/2010	5:25:05 PM	Run finished at 5:25 PM
12/7/2010	5:36:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2010	5:36:07 PM	Recipe started at 5:36 PM
12/7/2010	5:36:07 PM	Helium valve closed
12/7/2010	5:36:07 PM	H2 valve closed
12/7/2010	5:36:07 PM	BCl3 valve closed
12/7/2010	5:36:07 PM	PH3 valve closed
12/7/2010	5:36:07 PM	SiCl4 pre valve closed
12/7/2010	5:36:07 PM	SiCl4 post valve closed
12/7/2010	5:36:07 PM	Main Vac valve closed
12/7/2010	5:36:07 PM	Bubbler valve closed
12/7/2010	5:36:07 PM	Bypass valve opened
12/7/2010	5:36:07 PM	Helium MFC set to  0.000000
12/7/2010	5:36:07 PM	H2 MFC set to  0.000000
12/7/2010	5:36:07 PM	BCl3 MFC set to  0.000000
12/7/2010	5:36:07 PM	PHl3 MFC set to  0.000000
12/7/2010	5:36:07 PM	SiCl4 MFC set to  0.000000
12/7/2010	5:36:07 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	5:36:07 PM	Tube furnace set to 0
12/7/2010	5:36:59 PM	Helium valve closed
12/7/2010	5:36:59 PM	H2 valve closed
12/7/2010	5:36:59 PM	BCl3 valve closed
12/7/2010	5:36:59 PM	PH3 valve closed
12/7/2010	5:36:59 PM	SiCl4 pre valve closed
12/7/2010	5:36:59 PM	SiCl4 post valve closed
12/7/2010	5:36:59 PM	Bubbler valve closed
12/7/2010	5:36:59 PM	Main Vac valve opened
12/7/2010	5:36:59 PM	Bypass valve opened
12/7/2010	5:36:59 PM	Helium MFC set to  0.000000
12/7/2010	5:36:59 PM	H2 MFC set to  0.000000
12/7/2010	5:36:59 PM	BCl3 MFC set to  0.000000
12/7/2010	5:36:59 PM	PHl3 MFC set to  0.000000
12/7/2010	5:36:59 PM	SiCl4 MFC set to  0.000000
12/7/2010	5:36:59 PM	Bypass solenoid MFC set to  0.000000
12/7/2010	5:36:59 PM	Tube furnace set to 0
12/7/2010	5:37:00 PM	Run finished at 5:37 PM
12/7/2010	5:37:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
